SMIM150-G5AFM探针扫描微波导电探针
型号 | SMIM150-G5 |
制造厂商 | PrimeNano |
探针描述 | 同轴氮化硅探针 |
类型 | 电学模式 |
应用 | SMIM(扫描微波);扫描电容模式;导电模式 |
SMIM150-G5AFM探针扫描微波导电探针
悬臂描述 | |||||
Lever | 1 | 2 | 3 | 4 | |
Spring k (N/m) | 8 (7 - 9) | - | - | - | |
Freq (kHz) | 75 (70 - 80) | - | - | - | |
Length (µm) | 150 (145 - 155) | - | - | - | |
Width (µm) | 50 (47 - 53) | - | - | - | |
Thickness (µm) | 3.6 (3.3 - 3.9) | - | - | - | |
Shape | rectangular | - | - | - | |
Material | Silicon | - | - | - | |
Reflex Coating (nm) | TiW/Au (500) | - | - | - |
针尖描述 | ||
Tip radius (nm) | 50 +/- 10 | |
Tip height (µm) | 5 +/- 0.5 | |
Front angle (°) | 35 +/- 1 | |
Back angle (°) | 35 +/- 1 | |
Side angle (°) | 35 +/- 1 | |
Tip shape | 4-sided | |
Tip material | TiW | |
Tip coating (nm) | none |