VAT真空阀门，阀门的！
Angle valves, diaphragm valves
211 - Dosing Valve
Dosing- and closing valve
212 - Pressure Relief Valve
Protects tools against pressure >1.5 bar; Trigger point is adjustable between 1.2 and 1.5 bars abslout.
213 - Venting Valve
Venting valve
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214 - Mini Vacuum Angle/Inline Valve DN5
Compact valves provide short cycle times
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216 - HV-Angle/Inline Valve (DN16 - 40; DN63 - 160)
High vacuum angle valves with bellows feedthrough. Modular design.
220 - Diaphragm valve (DN 16 - 40)
Manually operated diaphragm valves with forged body and robust actuator.
244 - Vacuum angle valve (DN10 - 250)
Vacuum angle valves with shaft feedthrough. No actuator parts in the vacuum. Therefore, low particle. Modular design.
245 - Vacuum inline valve (DN10 - 50; DN80)
Inline valve with shaft feedthrough for large gas flows.
250 - HV angle valve
High vacuum cylinder valve
251 - HV inline valve
High vacuum cylinder valve
252 - HV 3/2 way valve
High vacuum Cylinder valves
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263 - HV angle valve DN100 - 160
High vacuum angle valve with bellows feedthrough and large conductance.
264 - HV angle valve (DN10 - 250)
High vacuum angle valves with bellows feedthrough. Modular design.
265 - HV inline valve
Standard HV inline valve with bellows feedthrough.
For large gas flows we recommend Series 24.
284 - UHV angle valve (DN16, DN40, DN63)
UHV angle valves. Extremely low outgassing rate.
290 - Angle valve with soft-pump (DN25 - 80)
Offers reduced turbulence during initial pump down giving low particle count.
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291 - Inline valve with soft-pump (DN25 - 50, DN80)
Offers reduced turbulence during initial pump down giving low particle count.
292 - Angle valve with soft-pump (DN100 - 160)
Offers reduced turbulence during initial pump down giving low particle count.
541 - Easy close all-metal angle valve
All-metal angle valve with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Manual actuator (hexagon head, inner-square or handwheel). The manual closing movement ends at a mechanical stop; no torque wrench needed. Bakeable to 300°C in the open and closed position. Fixed CF-R rotating flanges for CF edge protection and easy mounting. Easy seal replacement - two times a leak on the seat can easily be repaired on site. Highly radiation resistant.
570 - All-metal angle valve
ID63, 100 and 160. All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head), double acting pneumatic actuator or spring closing actuator. Manual closing is performed with a specified torque. Bakeable to 300°C in open and closed position. High conductance. Radiation resistant.
571 - All-metal angle valve
ID 10, 16 and 40. All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head) ID16 and 40, double acting pneumatic actuator or spring closing actuator. The manual closing movement ends at a mechanical stop; no torque wrench needed. Bakeable to 450°C in the open position and to 350°C in the closed position (DN10 max. 250°C). High conductance. Radiation resistant.
590 - Variable leak valve
All metal variable leak valve for precise, reproducible adjustment of gas flows. Available with manual actuator (knurled knot) or stepper motor driven. Closing to a mechanical stop to give a reliable leak tight position without the risk of over tightening. Bakeable to 300°C in the open and closed position and no requirement for lubrication during the specified lifetime.
Angle valves, diaphragm valves
211 - Dosing Valve
Dosing- and closing valve
212 - Pressure Relief Valve
Protects tools against pressure >1.5 bar; Trigger point is adjustable between 1.2 and 1.5 bars abslout.
213 - Venting Valve
Venting valve
214 - Mini Vacuum Angle/Inline Valve DN5
Compact valves provide short cycle times
216 - HV-Angle/Inline Valve (DN16 - 40; DN63 - 160)
High vacuum angle valves with bellows feedthrough. Modular design.
220 - Diaphragm valve (DN 16 - 40)
Manually operated diaphragm valves with forged body and robust actuator.
244 - Vacuum angle valve (DN10 - 250)
Vacuum angle valves with shaft feedthrough. No actuator parts in the vacuum. Therefore, low particle. Modular design.
245 - Vacuum inline valve (DN10 - 50; DN80)
Inline valve with shaft feedthrough for large gas flows.
250 - HV angle valve
High vacuum cylinder valve
251 - HV inline valve
High vacuum cylinder valve
252 - HV 3/2 way valve
High vacuum Cylinder valves
263 - HV angle valve DN100 - 160
High vacuum angle valve with bellows feedthrough and large conductance.
264 - HV angle valve (DN10 - 250)
High vacuum angle valves with bellows feedthrough. Modular design.
265 - HV inline valve
Standard HV inline valve with bellows feedthrough.
For large gas flows we recommend Series 24.
284 - UHV angle valve (DN16, DN40, DN63)
UHV angle valves. Extremely low outgassing rate.
290 - Angle valve with soft-pump (DN25 - 80)
Offers reduced turbulence during initial pump down giving low particle count.
291 - Inline valve with soft-pump (DN25 - 50, DN80)
Offers reduced turbulence during initial pump down giving low particle count.
292 - Angle valve with soft-pump (DN100 - 160)
Offers reduced turbulence during initial pump down giving low particle count.
541 - Easy close all-metal angle valve
All-metal angle valve with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Manual actuator (hexagon head, inner-square or handwheel). The manual closing movement ends at a mechanical stop; no torque wrench needed. Bakeable to 300°C in the open and closed position. Fixed CF-R rotating flanges for CF edge protection and easy mounting. Easy seal replacement - two times a leak on the seat can easily be repaired on site. Highly radiation resistant.
570 - All-metal angle valve
ID63, 100 and 160. All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head), double acting pneumatic actuator or spring closing actuator. Manual closing is performed with a specified torque. Bakeable to 300°C in open and closed position. High conductance. Radiation resistant.
571 - All-metal angle valve
ID 10, 16 and 40. All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head) ID16 and 40, double acting pneumatic actuator or spring closing actuator. The manual closing movement ends at a mechanical stop; no torque wrench needed. Bakeable to 450°C in the open position and to 350°C in the closed position (DN10 max. 250°C). High conductance. Radiation resistant.
590 - Variable leak valve
All metal variable leak valve for precise, reproducible adjustment of gas flows. Available with manual actuator (knurled knot) or stepper motor driven. Closing to a mechanical stop to give a reliable leak tight position without the risk of over tightening. Bakeable to 300°C in the open and closed position and no requirement for lubrication during the specified lifetime.
