YAP510S 日本YAMATO大气等离子清洗机YAP510S

Atmospheric Plasma Cleaner canbeapplied to wide range of usage such as electronic materialbyutilizing high-activation of high-energy electron and radicalionin plasma reaction.

This equipment has a lotofadvantages;

• Vacuum Process isnotrequired
• Simple Utility Preparation(Reactiongas and power supply only)
• Setting space also is saved(becauseof no vacuum system)
• Vacuum tank is not required sothatthe wider space is available for various purposes.

• The sample can bedirectlyplasma-processed just by putting it on the stage.
• Low Temp. Plasma isavailablebecause of the atmospheric glow-discharging plasma
• Easily applied to In-linesystembecause of no vacuum system.

Application

• Surface treatment for highpolymermaterials
• Glass panel cleaning for FPD
• Ashing treatment
• Surface activation(OxidationorDeoxidization)