HORIBA SEC-7330
SEC-7300 series
Mass flow controllersSEC-4400 series The best-selling series that showed the world what ultra-clean means
Mass flow controllersSEC-4401/4501 The ultimate in analog mass flow controllers
sUltra clean: All metal construction (SEC-4000M type) sCompatible with a wide variety of flow rate control needs: Flow rate control between 0.1 SCCM and 100 SLM (N2) available in a single series. sModels that prevent thermal siphoning: Mass flow controllers that are not affected by the installation orientation (SEC-4400MF/4500MF types). Feature a new sensor (patent pending) that prevents thermal siphoning through the very principles of its construction. sConforming gases: C2F6, C3F8, C4F8, SF6, SiF4, etc, sUltra clean: All metal construction (SEC-4000M type) sAuto-close function is standard. sModel with purge mode: SEC-4400SP type sWide range model:
SEC-4400SR type
sHigh reliability: New sensor design, stable zero point: achieve ±20 mV/y (typical) sHigh precision: ±0.8 F.S. (SEC-4401 type) sFast response: Feature an ultra-quick start function and offer response times under a second over the entire flow rate range. sModels that prevent thermal siphoning: Mass flow controllers that are not affected by the installation orientation (SEC-4000MF type). Feature a new sensor (patent pending) that prevents thermal siphoning through the very principles of its construction. Conforming gases: C3F6, C3F8, C4F8, SF6, SiF4, etc, sUltra clean: All metal construction (SEC-4001M type) sAuto-close function is standard.
Compact mass flow controllers
The series that became the de facto standard in compact mass flow controllers
HORIBA SEC-7320
sCompact: With just 106 mm between surfaces, can perform flow rate control at up to 30 SLM (N2) (up to 50 SLM (N2) is available with this series). sFlow rate control at extremely low flow rates: The SEC-7320 F.S. 1 SCCM model offers flow rate control for flow rates as low as 0.02 SCCM. sCompatible with SDS (Safe Delivery Source Model): The SEC-734 OLD model offers differential pressure control from 1.33 kPa. Conforming gases: SDS cylinders packed with ASH3, BF3, SiF4, GeF4, etc. (SDS is a registered trademark of Matheson Tri-Gas, Semi-Gas, Semi-Gas Division, and ATMI, Inc.) sUltra clean: All metal construction (SEC-7300M type) sAuto-close function is standard.
