好处
- 高生产力 - 响应时间快于 2 ms
- 灵活集成 - EtherCAT 现场总线
- 使用寿命长 - 经验证的陶瓷传感器
- 忘记重新校准 - 90ppm/年稳定性
典型应用
- 原子层沉积
- 高速过程控制
- PVD、CVD、蚀刻
- 一般高温真空应用
规格
类型 | 1000 ... 500 Torr / mbar | 200 ... 1 Torr / mbar | 0.5 ... 0.1 Torr / mbar | |
---|---|---|---|---|
精度 (1) | % of reading | 0.2 | 0.2 | 0.4 |
温度效应 | ||||
零点 | percent FS/°C | 0.0025 | 0.0025 | 0.005 |
满量程 | % of reading / °C | 0.02 | 0.02 | 0.02 |
压力, | kPa (absolute) | 400 | 260 | 130 |
分辨率 | percent FS | 0.003 | 0.003 | 0.003 |
读数 | percent FS | 0.01 | 0.01 | 0.01 |
建议的读数 | percent FS | 0.05 | 0.05 | 0.05 |
建议的控制压力 | percent FS | 0.5 | 0.5 | 0.5 |
温度 | ||||
运行(环境) | °C | +10 … +50 | +10 … +50 | +10 … +50 |
在法兰处烘烤 | °C | ≤110 | ≤110 | ≤110 |
贮存 | °C | –20 … +85 | –20 … +85 | –20 … +85 |
电源电压 | +14 … +30 VDC or±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
功耗 | ||||
加热时 | W | ≤16 | ≤16 | ≤16 |
运行温度 | W | ≤11 | ≤11 | ≤11 |
输出信号(模拟) | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
Measurement rate | kHz | 1 | 1 | 1 |
反应时间 (2) | ms | 2 ... 20 | 2 ... 20 | 2 ... 20 |
Signal processing time | ms | 2 | 2 | 2 |
保护等级 | IP 30 | IP 30 | IP 30 | |
标准 | ||||
CE 合规 | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | |
ETL 认证 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
SEMI 合规 | SEMI S2 | SEMI S2 | SEMI S2 | |
电气连接 | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | |
设定点 | ||||
设定点数量 | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
继电器触点 | ≤30 | ≤30 | ≤30 | |
滞后 | percent FS | 1 | 1 | 1 |
诊断端口 | ||||
协议 | USB | USB | USB | |
读数 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
设置 | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
暴露于真空的材料 | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
内部容积 | ||||
内部容积 1/2'' 管 | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
内部容积 DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
内部容积 DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
内部容积 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
重量 | ||||
重量 1/2'' 管 | g | 837 | 837 | 837 |
重量 DN 16 ISO KF | g | 852 | 852 | 852 |
重量 DN 16 CF-R | g | 875 | 875 | 875 |
重量 8 VCR® | g | 897 | 897 | 897 |
EtherCAT | ||||
协议 EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
通讯标准 | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | |
节点地址 | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
物理层 | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
数字功能读取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
数字功能设置 | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | |
邮箱 (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
过程数据 | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
EtherCAT 连接器 | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT | 2 x RJ45, 8-pin (socket), IN and OUT | |
电缆 | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
电缆长度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
Signal processing time | ms | 2 | 2 | 2 |
(1) 非线性,迟滞,在 25°C 环境工作温度中的可重复性,2 小时工作后无温度影响。
(2) 提高 10 … 90 % FS
数据表
手册
手册
三维步骤文件
其他文件