适合控制化学药液的单个成分。
- 实时、高性能检测多达 8 种组分
- 无需试剂，零样品消耗，降低拥有成本
-
安装简单，即装即用
CS-700高精度、高稳定性化学药液浓度计
HORIBA CS-700 化学药液浓度计能够对*半导体制程中使用的复杂化学药液的单个化学成分进行高性能测量。
通过改进 HORIBA 的光谱测量技术，CS-700 测量性能提升高达 5 倍。
提供增强的质量控制，改进半导体制程。
适合控制化学药液的单个成分。
- 实时、高性能检测多达 8 种组分
- 无需试剂，零样品消耗，降低拥有成本
-
安装简单，即装即用
技术参数：
Unit : mass%
| Component | Measurable range | Repeatability | |
|---|---|---|---|
| 1st solution | HNO3 | 30.0 - 34.0 | ±0.5 |
| HF | 2.00 - 4.00 | ±0.10 | |
| H3PO4 | 35.0 - 39.0 | ±0.6 | |
| H2SiF6 | 0.00 - 3.00 | ±0.50 | |
| H2O | 25.0 - 33.0 | ±1.0 |
Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C
- Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
- The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)
Specifications Comparison with Previous Model
| item | CS-100 | CS-700 |
|---|---|---|
| Measurement principle | Absorption spectroscopic method | Absorption spectroscopic method |
| Sample temperature | 20 to 30 Degree C | 20 to 30 Degree C |
| Ambient temperature | 20 to 25 Degree C | 20 to 30 Degree C |
| Components | Max. 4 components | Max. 8 components |
| Chemical range | Max. 4 ranges | Max. 6 ranges |
| Communication | Parallel I/O, Analog output, RS-232C | Parallel I/O, Analog output, RS-232C |
| Analog output (4-20 mA) | Max. 2 components | Max. 6 components |
| Dimension | 205(W) X 329(D) X 269(H)mm | 218(W) X 391(D) X 213(H)mm |
| Power source | DC 24V | DC 24V(Same connecter of CS-100) |
| Consumable parts | Halogen lamp | Halogen lamp (Same as CS-100 type) |
| Wavelength | UV/NIR | UV/NIR |
| Wetted material | PTFE, PFA, Sapphire or Quartz, | PTFE, PFA, Sapphire, Kalrez 4079 O-ring |
