Large CapacitySDE Series
Standard type for harsh process
01
FEATURE
Available up to
200kL/min.
02
FEATURE
Best for
large wafer and FPD.
03
FEATURE
Durable to
various processes.
Major Products
| Spec. / Products *1 | SDE1220 | SDE20M20 | SDE30M20 | SDE4060 | SDE4030M20 | SDE8060 | SDE804060 |
| Max. pumping speed [L/min] *2 | 20,000 | 30,000 | 50,000 | 60,000 | 80,000 | 120,000 | 190,000 |
| Ultimate pressure [Pa] *2 | 0.5 | 0.8 | 0.5 | 0.8 | 0.5 | ||
| Supply voltage (50/60Hz) | 3Phase AC200～220V, 380～480V | ||||||
| Dimensions [mm] W*H*L *3 | W:400 H:780 L:930 | W:450 H:950 L:1000 | W:450 H:950 L:1000 | W:750 H:1200 L:1600 | W:800 H:1580 L:1320 | W:850 H:1220 L:1600 | W:1000 H:1980 L:1850 |
*1) Smaller than 20,000L/min pumps are also available. *2) Without N2 purge.
*3) Package size. Dimensions vary by specification.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
S-P Curve
*S-P curves vary by combination.
