电阻率25℃ | >5MΩ﹒cm |
TOC | <30ppb |
注:若从E-POD取用纯水,超纯水机可达到以下水质指标
颗料* | >0.2um/mL)*<1p/mL |
细菌* | <1cfu/mL |
热原(内毒素)** | <0.001 EU/mL |
RNases** | <0.01ng/mL |
DNases** | <4pg/mL |
Milli-Q超纯水机(从Q-POD取用,超纯水/I级水水质)
电阻率25℃ | 18.2MΩ﹒cm |
TOC | <5ppb |
颗料* | (>0.22um/mL)*<1p/mL |
细菌* | <1cfu/mL |
热原(内毒素)** | <0.001 EU/mL |
RNases** | <0.01ng/mL |
DNases** | <4pg/mL |