主要特性 | AWM42150VH | AWM42300V | AWM43300V | AWM43600V |
流量范围(满量程) | ±25 sccm | ±1000 sccm | +1000 sccm | +6 SLPM |
输出电压@标定点 | 8.5mV±1.5mV @25 sccm | 54.7mV±3.7mV DC @1000 sccm | 5V±0.15VDC @1000 sccm | 5V±0.15VDC @6 SLPM |
零点电压 | 0.0±1.0mVDC | 0.0±1.5mVDC | 1.0±0.05VDC | 1.0±0.05VDC |
零点电压漂移,典型值 | ±0.20mVDC | ±0.20mVDC | ±0.025VDC | ±0.025VDC |
输出电压漂移,值 | ±2.5% Reading 典型值 | ±2.5% Reading 典型值 | ±6.0%Reading 典型值 | ±6.0%Reading 典型值 |
功耗(mW) | 60(值) | 60(值) | 60(值) | 75(值) |
重复性&迟滞 | ±0.35% Reading | ±0.50% Reading | ±0.50% Reading | ±1.0% Reading |
压降@满量程(英寸水柱) | 0.008(典型值) | 1.02(典型值) | 1.02(典型值) | 8.0(典型值) |
| 最小值 | 典型值 | 值 | 单位 |
激励电压(VDC) | 8.0 | 10.0±0.01 | 15 | VDC |
响应时间 | | 1.0 | 3.0 | ms |
标定气体 | | 氮气 | | |
比率误差 | | ±0.3%读数 | | |