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HORIBA SEF-4140

HORIBA SSEC-4400 series The best-selling series that showed the world what ultra-clean means
Mass flow controllersSEC-4401/4501 The ultimate in analog mass flow controllers
sUltra clean: All metal construction (SEC-4000M type) sCompatible with a wide variety of flow rate control needs: Flow rate control between 0.1 SCCM and 100 SLM (N2) available in a single series. sModels that prevent thermal siphoning: Mass flow controllers that are not affected by the installation orientation (SEC-4400MF/4500MF types). Feature a new sensor (patent pending) that prevents thermal siphoning through the very principles of its construction. sConforming gases: C2F6, C3F8, C4F8, SF6, SiF4, etc, sUltra clean: All metal construction (SEC-4000M type) sAuto-close function is standard. sModel with purge mode: SEC-4400SP type sWide range model: SEC-4400SR type

SEC-Z500 series
SEC-Z10D/Z10DW seriesDigital mass flow controllersSEC-F700 series
Digital mass flow controllersSEC-V100D series
Cutting edge models with DeviceNet™ or Digital communications
sAdvanced High reliability 32bit CPU installed. s10SCCM-10SLM FS (standard gas) is covered by 6MFCs. sGas and FS flow specification are available to change easily by user. (MRMG function) sHigh precision. (Set point accuracy) sFast Response across the whole  flow range. (Variable PID function) sAnalog/Digital (RS485) control mode or DeviceNet Interface available. (Passed the  ODVA (DeviceNet  Association) SEMI SIG conformance test.) sCompact   

HORIBA SEC-Z522MGX

SEC-Z512: Compatible with 1.125 inch pitch gas panel.   SEC-Z512/522: 106mm between VCR surface (Compatible with 1.5 inch gas panel.)
Cutting edge models with DeviceNet™ communications
sCompatible with the DeviceNet™ interface: Passed the ODVA (DeviceNet™ Association) SEMI SIG conformance test. sFull scale 5 SCCM to 100 SLM flow rate lineup. sFast response in the control flow rate range. sUltra clean models featuring piezo valves. sCompact SEC-Z11D/Z12D: Compatible with 1.125 inch pitch gas panels SEC-Z10DW/Z12DW: 106 mm between VCR type surfaces (Compatible with 1.5 inch pitch gas panels)