珠海市信科自动化设备有限公司
珠海市信科自动化设备有限公司
提升价值驱动型金属密封应用的性能标准型号GF80对于许多工业和半导体加工过程，性能和成本效率同样重要
对于许多工业和半导体加工过程，性能和成本效率同样重要。GF80 系列金属密封质量流量控制器拥有以下两个特点：设计采用与的 GF100 系列响应速度相同的传感器以及第四代 MultiFlo™ 技术，该产品是高性价比运营的正确选择。另外，金属密封的 MFC 拥有 MultiFloTM 多气体/多量程功能所带来的全部优势，原因是可用气体方面没有限制并且由于不会发生弹性体氧渗透而提升了气体纯度，同时还由于金属密封件有效期相当长而减少了维护工作量。
概述
| GF80 | |
| 区别 | High Purity Low Flow Rate |
| 流量范围-满量程容量 | 3 sccm - 55 slm |
| 表面抛光 | 16µ inch Ra |
| 精度 | ±1% S.P. 35-99% ±0.35% F.S. 2-35% |
| 重复性 | < ±="" 0.2%=""> |
| 响应时间-常闭 | Normally Closed Valve <1> |
| 多气体多量程 | MultiFlo™ Available |
| 瞬时压力波动不敏感 | — |
| 诊断能力 | Status Lights: MFC Health, Network Status Alarms: Control Valve Output, Network Interruption |
| 模拟通讯 | 0-20 mA 4-20 mA 0-5 Vdc 0-10 Vdc |
| 数字通讯 | Profibus RS485 S-Protocol RS485 L-Protocol DeviceNet™
|
型号
Mass Flow Controller
±1% S.P. 35-99%
±0.35% F.S. <>
±0.5% F.S. (included in accuracy)
Normally Closed Valve: <1>
< 5%="" -="">
Standard GF Series: 11 bins
High Flow GF Series: 4 bins
Standard GF Series: < 1%="">
High Flow GF Series: < 4%="" of="" standard="" configuration="" f.s.="" @="" 30psig/atm="" out="" n2="">
316 Stainless Steel
Hastelloy C-22
17-7 PH
430SS
KM-45
Normally Closed
Meter (no valve)
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-50000 sccm = 25-45 psid
51-300 slm = 30-90 psid
(typical pressure drops)
Standard GF Series: 150 psig (10 bar)
High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)
Control Valve Output, Network Interruption
RS485 via 2.5mm jack (all models)
0-20 mA
4-20 mA
0-5 Vdc
0-10 Vdc
DeviceNet™
Profibus®
RS485 S-Protocol
RS485 L-Protocol
RS485 A-Protocol (GF081)
Profibus/Analog via 9-Pin "D" connector
RS485/Analog via 9-Pin"D" connector, 15-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Standard GF Series: RS485 from +12 Vdc to +24 Vdc = 7 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 7 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 13.6 Watts max
High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max
Profibus from +13.5 Vdc to +27 Vdc = 3.3 Watts max
DeviceNet™ from +11 Vdc to +25 Vdc = 3.3 Watts max
CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
RoHS
文档
| Filename | File Type | Documents By Language |
|---|---|---|
| Data Sheet | English Japanese | |
| Installation & Operation Manual | English Japanese | |
| DeviceNet™ Supplemental Manual - GF40, GF80 | English | |
| EtherCAT® Supplemental Manual - GF40, GF80 | English | |
| RS485 A-Protocol Supplemental Manual - GF40, GF80 | English | |
| RS485 L-Protocol Supplemental Manual - GF40, GF80 | English | |
| RS485 S-Protocol Supplemental Manual - GF40, GF80 | English | |
| CE EU Declaration of Conformity Certificate | English |
CAD Drawings
Use the model code information from the data sheet to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.
| Filename | File Type |
|---|---|
| GF080-VX-DNET-STEP | STEP |
| GF080-VX-L4-STEP | STEP |
| GF080-VX-S0 | DXF |
| GF080-VX-S0 | IGS |
| GF080-VX-S0 | STEP |
| GF080-VX-S4 | DXF |
| GF080-VX-S4 | IGS |
| GF080-VX-S4-STEP | STEP |
| GF080-VX-S5 | DXF |
| GF080-VX-S5 | IGS |
| GF080-VX-S5 | STEP |
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