美国博曼（BOWMAN）X荧光测厚仪原理

关于美国博曼（BOWMAN）X荧光镀层测厚仪原理：

对被测样品发射一次X射线，样品的原子吸收X射线的能量后被激发并释放出二次X射线。通过测量被释放出的二次X射线的特征能量和强度，就能够对被测样品的镀层厚度和成份进行定性和定量分析。

X荧光新技术

• Different types of detectors

?Improved resolution

?Improved stability

?Prolonged life

• Various X-ray tube targets

?Optimized for challenging applications

?Cr, Mo, W, Rh, etc.

•X-ray optics

?Poly capillary optics

?Halo reduction optics

• Modular design

?Miniaturized components

?Low component cost

?Better serviceability

检测器的发展

正比计数器 

• Xe, Ne, or other halogen gas filled

• Drift with temperature or/and humidity change

• 10,000~30,000 cps

• 800~1200eV at Mnresolution

• Shorter life (2~5 years)

PIN 检测器

• Thermoelectrically cooled (Peltier)

• Be window

• Count rates: 3000~50,000 cps

• Resolution: 170~240eV at Mn K a

• 10+ years life

硅漂移检测（SDD）

• Thermoelectrically cooled (Peltier)

• Be window or Carbon based material

• Light element capability (i.e. P, Si, Al)

• Count rates: 10,000~1,000,000 cps

• Resolution: 120~170eV at Mn K a• 10+ years life

固态检测器的优点

• Phosphorus analysis electroless Ni

• Improved detection ldown to Angstrom olevel

• Separation of overlaelements

• Improved stability wiminimal drift

• Less maintenance1um Au/5um Ni/Inf Cu