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【各项技术参数】

SLA5800 Series: Digital Thermal Mass    Flow Meter/Flow Controller, Elastomer Seals
   
   Brooks SLA5800 Series elastomer sealed    digital thermal mass flow measurement and control products offer    unparalleled flexibility and performance. They offer faster response,    better accuracy and improved control over traditional analog devices.    Industry leading repeatability ensures a stable process even under changing    conditions. Self diagnostics and alarms eliminate downtime. These devices    are globally approved for use in a variety of service areas.

流量范围：3sccm-30slpm     精度：1% Rate or 0.7% Rate 0.2% FS        zui大压力：300bar     4500psig   温度：65℃     150F       信号：0-5V 4-20mA RS-485