Semyos能量色散式X射线荧光光谱仪：Moreover, with its<23um FWHM microspot, it is able to measure in the scribelines or in dedicated metrology areas on production wafers.
详细介绍
品牌
PANALYTICAL/帕纳科
Semyos能量色散式X射线荧光光谱仪仪器简介：
PANalytical's Semyos energy-dispersive XRF wafer analyzer is the latest of our successful process control tools designed specifically for semiconductor and data storage metrology. This versatile instrument determines layer composition and thickness uniformity for a wide range of process films.
Moreover, with its<23um FWHM microspot, it is able to measure in the scribelines or in dedicated metrology areas on production wafers.
The Semos wafer analyzer is an advanced metrology tool that addresses the Semyos能量色散式X射线荧光光谱仪following industry demands: * On-product thin film metrology * In-line process control * Simultaneous determination of film thinkness and composition * Ability to characterize single films and multi-layer stacks * Excellent repeatability and reproducibility (Gauge R&R) * Minimal COO through excellent uptime, high throughput and minimum consumption of utilities
主要特点：
Semyos: Addressing the needs of the semiconductor and data storage industry.
Microspot XRF analysis on production wafers Versatile wafer handling For in-line production XRF analysis Designed for ease-of-use
