薄膜厚度 | 窗口面积 | 压力差 |
≥50 nm | ≤1.0 x 1.0 mm | 1 atm |
≥100 nm | ≤1.5 x 1.5 mm | 1 atm |
≥200 nm | ≤2.5 x 2.5 mm | 1 atm |
薄膜厚度 | 窗口尺寸 | 框架尺寸 | 型号 |
50-200nm | 1.5X1.5mm | 5.0X5.0mm | RISUN |
50-200nm | 2.5X2.5mm | 7.5X7.5mm | |
50-200nm | 3.0X3.0mm | 10X10mm | |
50-200nm | 5.0X5.0mm | 10X10mm |
薄膜厚度 | 窗口尺寸 | 框架尺寸 | 型号 |
50nm | 2x2阵列,1.5X1.5mm | 5.0X5.0mm | RISUN |
50nm | 3x3阵列,1.5X1.5mm | 7.5X7.5mm | |
100nm | 4x4阵列,1.5X1.5mm | 10X10mm |