上海依阳实业有限公司
超高精度真空压力PID控制装置UltraHighPrecisionVacuumPressurePIDController上海依阳公司推出的超高精度真空压力PID控制装置是一种采用电气比例阀
超高精度真空压力PID控制装置
Ultra High Precision Vacuum Pressure PID Controller
上海依阳公司推出的超高精度真空压力PID控制装置是一种采用电气比例阀,但通过外置超高精度传感器和PID控制器,实现真空压力超高精度控制的装置,由此可实现真空、微正压、高压和超高压范围内的精密控制,可实现优于±0.1%的真空压力超高精度控制,国内工业应用领域内超高精度真空压力控制的空白,并可替代国外相关产品。
一、微正压超高精度PID控制装置
Micro Positive Pressure Ultra High Precision PID Control Device
微正压控制装置主要包括微正压电气比例阀和相应量程的外接超高精度压力传感器,通过超高精度的PID控制器可实现优于±0.1%的精密控制。
二、微负压超高精度PID控制装置
Micro Negative Pressure Ultra High Precision PID Control Device
三、电气比例阀超高精度压力PID控制装置
Ultra-High Precision Pressure PID Control Device of Electric Proportional Valve
电气比例阀超高精度压力控制装置主要包括电气比例阀和相应量程的外接超高精度压力传感器,通过超高精度的PID控制器可实现优于±0.1%的精密控制。
四、先导式气动减压阀(背压阀)的精密高压控制
Precision High Pressure Control of Pilot Pneumatic Pressure Reducing Valve (Back Pressure Valve)
五、应用视频
Appplication Video
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真空控制系统在PVT法碳化硅单晶生长设备中的应用——国产化替代解决方案 | |
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六、应用文章
Appplication Notes
(1)SMC IRV系列手动真空调节阀低压控制性能考核试验
SMC IRV Vacuum Regulator Low Pressure Control Performance Assessment Test
(2)工业应用中0.1%超高精度PID控制器的实现及其关键指标分析
Realization of 0.1% Ultra-high Precision PID Controller in Industry and Analysis of Its KeyParameters
(3)表压0.1~0.6MPa范围内0.1%超高精度压力控制解决方案及其考核试验结果
0.1% Ultra-High-Precision Pressure Control Solution in the Range of Gauge Pressure 0.1~0.6MPa and Its Assessment Test Results
(4)微正压0.1MPa以下的超高精度PID控制及其演示验证结果
Ultra High Precision PID Control with Micro-Positive Pressure Below 0.1MPa and Its Demonstration and Verification Results
(5)压力传感器和电气比例阀测控精度的基本概念及其使用方法
Basic Concept and Application Method of Measurement and Control Accuracy of Pressure Sensor and Electric Proportional Valve
(6)三种典型电气比例阀压力控制精度的对比考核试验
Contrastive Assessment Test of Pressure Control Accuracy of Three Types of Electrical Proportional Valves
(7)PVT法碳化硅SIC晶体生长工艺高精度压力控制解决方案及其配套装置的国产化替代
High Precision Pressure Control Solution for PVT Method SIC Crystal Growth Pocess and Localized Replacement of Its Supporting Equipments
(8)采用电气比例阀串级控制法实现化学机械抛光(CMP)的超高精密压力控制
Ultra-High Precision Pressure Control of Chemical Mechanical Polishing is Realized by Cascade Control of Electric Proportional Valve
(9)超长管件注塑过程中采用串级控制实现高压压力精密控制的解决方案
Solution of Cascade Control to Realize High-Pressure Precision Control in the Injection Molding Process of Super-Long Pipe Fittings
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