当前位置:安捷来国际股份(香港)有限公司>>日本大和科学株式会社Yamato Scientific Co.,Ltd>>YAMATO等离子清洗机>> PR500/PR510日本YAMATO等离子清洗机PR500/510
日本YAMATO等离子清洗机PR500/510:
Gas Plasma Etcher |
PR500/PR510 |
| The PR500/510 isagasplasma device that is used widely for such applicationsasproductionof semiconductors and analysis work. Itboastsoutstandingoperability and safety, with an automatic tuningsystemas a standardcomponent and other features.
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The gas plasmaequipment has a wide range ofapplications fromashing, etching,dry cleaning,etc. |
Reaction Chamber | Control Panel |
| FORWARD/REFLECT indicatebydigital |
Operation Flowchart |
Piping System Diagram |
Specifications | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
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