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日本YAMATO在线式等离子清洗机ISP500

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具体成交价以合同协议为准

产品型号ISP500

品       牌

厂商性质经销商

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更新时间:2021-09-28 09:28:01浏览次数:175次

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日本YAMATO在线式等离子清洗机ISP500

日本YAMATO在线式等离子清洗机ISP500:

Plasma Apparatus
ISP500Series
Plasma Model
RIE/DP
RIE : Reactive Ion Etching
DP : Direct Plasma
RF Generator
10 to 500W
OscillatingFrequency
13.56MHz
Chamber Size (mm)
344W×230D×45H

In-Line and Stand Alone Type (Strip to Strip process)

Outline
Two lead frame(strip)vertical or parallel loading function. Pull out two stripfromMagazine--Loading two strip into the chamber--Plasumacleaningprocess--Unloading two strip from chamber--Strip goes tomagazineor next process to direct.
Total system controlled by PLC controller. LCD touch paneldisplayand operation. Lead frame (strip) size--Up to 25 to80(W)×100 to250(L)×0.2 to 2.5(t)mm also. We can provide CustomizedIn-Lineplasma.

Feature

  • Special electrode built inforgetting good plasma efficient.
  • RIE/DP mode selectable
  • RF power up to 500W
  • All automatic operation
  • LCD touch panel andPLCcontrol
  • Any chamber sizeareavailable for customer's Lead frameorstrip.
ISP500 Series


Specifications
Model ISP500 series
Plasmamethod RIE/DPmode
RFgenerator 10 to 500W
Oscillation frequency 13.56MHz
Controlsystem LCD touchpanelwith PLC
Tuningmethod Automatictuning
Chambersize 344(W)×230(D)×45(H)mm
Electrodesize 250(W)×180(D)mm
Gassystem Mass flowcontrol2 line

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