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当前位置：安捷来国际股份（香港）有限公司>>日本大和科学株式会社Yamato Scientific Co.,Ltd>>YAMATO等离子清洗机>> APPC-400Y日本YAMATO大气压等离子清洗机APPC-400Y

日本YAMATO大气压等离子清洗机APPC-400Y

日本YAMATO大气压等离子清洗机APPC-400Y
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产品型号APPC-400Y

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日本YAMATO大气压等离子清洗机APPC-400Y

详情介绍

日本YAMATO大气压等离子清洗机APPC-400Y :

Plasma apparatus-(Atmosphericpressure plasma cleaner)


APPC-400Y

System Outline
ThisEquipment is Atmosphere Plasma for cleaningsamplesurface.
Easy to make In-Line system with otherEquipment.UnifyandSeparation Type available, Also, Two kindsofElectronics(Insertion and Spout) type available.
Feature
  1. Does not need Vacuum systemsuchasVacuum pump and Vacuum chamber.
  2. Reaction gas use He,Ar andO2mixinggas for cleaning sample surface.

APPC-400Y-2

Sample
Sanplesize : Any size okay(W) x 45(D) x Max. 15(T)mm
Equipment Function

Loading Sample

  1. Useing conveyor or Armchuckforloading sample
  2. Sample are continuanceloadingtoelectrode.
  3. Un-load sample.
  4. Go to next process
  1. Automatic andManualoperationselectable.
  2. Touch panel operation
  3. Two Electrode can build inforheavydirt cleaning of sample surface.
  4. Easy to install and easytomakeIn-Line system.
  5. Electrode and Main unitcanbeseparately. Also, One controller cancontrolTwoElectrode.
ExternalDimension Systemstructure
  1. Unify type : W800 xL700xH1200mm
  2. Separately type : W800 xL700xH950mm
  1. Electrode unit
  2. RF generator unit (Inthecontrolunit)
  3. Gas flow unit (Inthecontrolunit)
  4. Touch panel (On controlunit)
  5. Cooling unit (Option)
  6. Loading andUn-loadingunit(Option)
Electrodeunit Gasflowunit

Two parallel flat plate.
Gas input hole for fill up mixing gas (He and Ar).
Also, water cooling port. (IN and OUT)

Mass flow controller system

  1. Ar : Max. 5L/min
  2. He : Max. 5L/min
  3. Oxygen : Max. 200mL/min

Electrode spec.

  1. Electrode : Aluminum Up to W300xL50x H20mm Water Cooling type.
  2. Around electrode matirial:Quartzglass
Controlunit Powersupply

Touch panelandprogrammablecontroller (PLC)

1. Set process recip
Gas flow
RF power
oading speed (Conveyorspeedetc.)

2. Process monitor
Gas flow, RF power
Error

3 phase AC220V 25A
Safetymechanism
  1. This Equipment builtinsafetyfunction system.
  2. Builit in safetycoverforElectrode

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