日本YAMATO等离子清洗机PB600/PB1000S/PA600D
日本YAMATO等离子清洗机PB600/PB1000S/PA600D是中型等离子清洗机
以下是型号的详细介绍：
| Gas Plasma Ashers |
| PB600/PB1000S/PA600D |
| Model | | PB600 | PB1000S | PA600D | | Plasma Mode | | DP | DF | DP :Direct Plasma
DF : Downflow | | High-frequency Output | | Max.600W | Max.1000W | Max.600W | | Oscillating Frequency | | 13.56 MHz | | Dimension of Stage(mm) | | ø200×300 | ø300×500 | for6-inch
wafer |
| - The PB series are of barred typeofdirect plasma method, and can be operated automatically bysimplesetting.
- The model PA600is a plasmaashingsystem after the downflow method, which copes with a6-inchwafer.
 Downflow method
|
| Specifications |
| Model | PB600 | PB1000S | PA600D |
|---|
| Plasmamethod | Barred type of DP mode | DF mode | | Electrode | Splitof Opposite electrode structure | Roundtypeelectrode structure | | RFgenerator | 0 to 600W | 50to1,000W | 0 to 600W | | Oscillating frequency | 13.56MHz | | Controlsystem | Digitaldisplaywith PLC control | Touch panelwithPLC | Digitaldisplaywith one touch operation | | Tuningmethod | Automatic and Manual tuning | | Timer | 1sec.to 9H 59min.59 sec. | | Chamber | Madeof quart glass | | Chambersize | ø200×300mmL | ø300×500mmL | Adapt for 6inchwafer | | Chambertemperature | Digital display | | Reactiongas | O2,CF4 or others | O2,Ar,CF4,C5F8,SF6 or others | | Purgegas | N2 or Dry air | | Flowmeter | Flow meter1line
(O2 0 to 1,000 ml/min.) | Massflow control with digital display
(CF4 0 to 300sccm, O2 0 to 1,000sccm) | | Vacuumgauge | Piranie type
(0.4 to 3,000Pa/0.004 to 30Torr) | Digital display (0.4 to 3,000Pa/0.004 to 30Torr) | | Vacuumpump | 250ml/min. | 700ml/min. | | Emargencystop switch | Pushtype switch | | Gasport | 1 line (1/4"SUSSwagelok) | 2line(1/4" SUS Swagelok) | | Purgeport | 1 line (1/4"SUSSwagelok) | 1line(1/4" SUS Swagelok) | | Vacuumport | 1 line (SUSNW25) | 1line( SUS NW25) | | Externaldimensions | 500mmW×600mmD×650mmH | 640mmW×850mmD×1,695mmH | 650mmW×800mmD×1,500mmH | | Powersupply | AC200/220/380V, 3 phase
ａnd AC100/220V, single phase | | Weight | Approx.130kg | Approx.180kg | Approx.150kg |
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