感应加热式高速升降温炉返回列表页

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产品型号RLA-1200

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更新时间：2021-10-01 10:14:08浏览次数：80次

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产品简介

感应加热式高速升降温炉：4to8inchwafersizeisavailableLowcostsystembymanualsusceptortransferUpperD1300H1850mmOperationtemperature400to1200℃HeatuprateMax

感应加热式高速升降温炉：

4 to 8 inch wafer size is available
Low cost system by manual susceptor transfer
Upper & lower cross lamp structure and soaking furnace improved the uniformity of in-plane temperature
Vacuum designed quartz tube enables accurate gas substitution and process at vacuum pressure
Equipped with operator friendly high performance control system

Outer dimension		W1300×D1300×H1850mm
Operation temperature		400 to 1200℃
Heat up rate		Max.200℃/sec
Lamp layout		Upper & lower cross lamp arrays
Number of control zone		6
Wafer size		4 to 8 inch
Wafer transfer		manual
Controller		Model RSC 1000
Option		Vacuum system, Clean bench