批量生产/实验室用卧式炉返回列表页

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产品型号Model 2000

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更新时间：2021-10-01 10:18:41浏览次数：88次

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产品简介

批量生产/实验室用卧式炉：Fromexperimentalusagetomassproduction

批量生产/实验室用卧式炉：

From experimental usage to mass production, various equipment configuration is available
Batch:25 to 150 wafers processing is available
1 to 4 stacks furnace configuration is implemented for taking advantage of limited square available
2 to 8 inch and 300mm wafer size are available
LGO heater for Low and medium high temperature, HGC heater for high temperature are provided for excellent temperature performance
Proposing equipment configuration according to the customer’s needs based on usage, space, and budget
Simple and well equipped control system

Heater		LGO heater, HGC heater
LGO heater (Operation temp.)		H40×117/175 (400~1150℃)
HGC heater (Operation temp.)		16×86 (400~1200℃)
Flat zone length		250/800
Wafer size		to 300 mm
Temp. control		3 Zone
Transfer equipment		Boat elevator, Boat loader, Cantilever loader, Soft loader