R&D, 少量生产用立式炉返回列表页

举报评价

参考价

面议

具体成交价以合同协议为准

产品型号VF-1000

品牌

厂商性质经销商

所在地

在线询价加入对比查看联系电话

联系方式：销售查看联系方式

更新时间：2021-10-01 10:20:42浏览次数：105次

联系我时，请告知来自仪表网

同类优质产品更多>

产品简介

RD1000H2100mmHeaterLGOheaterFlatzonelength160to250mmWafersizeto8inchBatchsizeto25wafersControllerModel880OptionForced-coolingsystem

R&D, 少量生产用立式炉：

High performance processing for R&D
Mini Batch, max 25 wafers batch processing
2 to 8 inch and 300mm wafer size are available
Equipped with LGO heater to realize high temperature performance as mass-production equipment
Equipped with limited function simple control system

Outer dimension		W1500×D1000×H2100mm
Heater		LGO heater
Flat zone length		160 to 250mm
Wafer size		to 8inch
Batch size		to 25wafers
Controller		Model 880
Option		Forced-cooling system, N₂ load lock, 25 to 150 wafers of processing (VF-2000)